Vertical vacuum coating machine with double chambers /The practical application of rotary cathode target

The rotary cathode target is one part of vacuum coating machine.

Features of rotating cathode target

1.The utilization of target has reached to 90%. Also means it could work longer.2. High deposition rate (usually 2-3 times of the cathode plane and depending on target species).3.It effectively reduce arcing and target surface dregs, process stability. It could eliminate the re-deposition zone form by the flat target. The polluted target surface is easy to produce dregs and then fell to the glass substrate. At the same time these areas is easy to create arc strike, which created more dregs and the formation of large particles. So the rotating cathode eliminates the re-deposition zone, thus ensuring the long-term stability of the coating process. 4. that is not necessary to "burn the target," so it could save target consumption and the target burning time. 5. The quick and easy target replacement operation can be achieved in some simple rotating cathode design, such as the U.S. SCI Corporation. The coating line equipped with multiple rotating cathodes has special significance, it save time and means to improve production capacity. 6 low melting points also can use high-power sputtering targets (including all material). Because of the target rotation, so the target surface has not been in the plasma area that improved the deposition rate.7. The rotating target more expensive than the plane target, but the high target utilization made it mach better of the cost performance.

Design drawings of the Rotating cathode

The rotary cathode target is one par of vacuum coating machine.The rotary cathode target applied to the vertical vacuum coating machine with double chambers.

Vertical vacuum coating machine with double chambers /The practical application of rotary cathode target